Vol. 11, Special Issue, April 2011, pp.64-73

Point-Mass Model for Nano-Patterning Using Dip-Pen Nanolithography (DPN)

Seok-Won Kang and ^*Debjyoti Banerjee

Department of Mechanical Engineering, Texas A&M University

3123 TAMU, College Station, TX 77843-3123, United States

^*Tel.: +1-979-845-4500, fax: +1-979-845-3081

E-mail: dbanerjee@tamu.edu

Received: 21 December 2010   /Accepted: 15 March 2011   /Published: 5 April 2011

Abstract: Micro-cantilevers are frequently used as scanning probes and sensors in micro-electromechanical systems (MEMS). Usually micro-cantilever based sensors operate by detecting changes in cantilever vibration modes (e.g., bending or torsional vibration frequency) or surface stresses - when a target analyte is adsorbed on the surface. The catalyst for chemical reactions (i.e., for a specific analyte) can be deposited on micro-cantilevers by using Dip-Pen Nanolithography (DPN) technique. In this study, we simulate the vibration mode in nano-patterning processes by using a Point-Mass Model (or Lumped Parameter Model). The results from the simulations are used to derive the stability of writing and reading mode for a particular driving frequency during the DPN process. In addition, we analyze the sensitivity of the tip-sample interaction forces in fluid (ink solution) by utilizing the Derjaguin-Muller-Toporov (DMT) contact theory.

Keywords: Derjaguin-muller-toporov, Contact theory, Vibration, Beam theory

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