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Point-mass model for nano-patterning using dip-pen nanolithography (DPN)
Year of publication 2011
Title of paper Point-mass model for nano-patterning using dip-pen nanolithography (DPN)
Authors Kang, S.-W. and Banerjee, D.
Volume 11(Special Issue)
Pages 64 - 73
Journal Sensors & Transducers Journal
Link 관련링크 11회 연결
Micro-cantilevers are frequently used as scanning probes and sensors in micro-electromechanical systems (MEMS). Usually micro-cantilever based sensors operate by detecting changes in cantilever vibration modes (e.g., bending or torsional vibration frequency) or surface stresses - when a target analyte is adsorbed on the surface. The catalyst for chemical reactions (i.e., for a specific analyte) can be deposited on micro-cantilevers by using Dip-Pen Nanolithography (DPN) technique. In this study, we simulate the vibration mode in nano-patterning processes by using a Point-Mass Model (or Lumped Parameter Model). The results from the simulations are used to derive the stability of writing and reading mode for a particular driving frequency during the DPN process. In addition, we analyze the sensitivity of the tip-sample interaction forces in fluid (ink solution) by utilizing the Derjaguin-Muller-Toporov (DMT) contact theory.